DiffractMOD™ is a design and simulation tool for diffractive optical structures such as diffractive optical elements, subwavelength periodic structures, and photonic bandgap crystals. It is based on the Rigorous Coupled Wave Analysis (RCWA) technique that has been implemented using advanced algorithms including fast Fourier factorization and generalized transmission line formulation. Already a market leader, the tool has extensive applications in a broad range of areas including semiconductor manufacturing and wave optics.
Field profile of metallic grating structure
Simulation of a Phase Shift Mask with DiffractMOD